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| Pimpex@RPM supplies Ultra-High Precision Semiconductor Micropore Equipment TMS-480/TMS-600-DOUBLE, whose standard configuration includes a single spindle; optional dual spindle with linear motor drive offers three times the processing efficiency and 30% longer tool life compared to conventional machines. Applicable to chip encapsulation and SiC wafer drilling. |
 A11 Semiconductor Micro Hole Ultra Precision Equipment Minimum Drilling Diameter 0.03mm |
 High Speed Spindle |
 Minimum Hole Diameter 0.03 mm |
 Semiconductor Silicon Carbide Board |
 Chip Encapsulation Equipment |
Ultra-High Precision Semiconductor Micropore Equipment: Direct-drive 5-axis machining centers are mainly used in the machining of multi-faceted precision parts in fields such as optical lens grinding, precision molds, military, aerospace, and automotive industries. Application Fields:
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 Ultra High Precision Micro Hole Machining for Semiconductor Micro Holes Minimum Ø0.03mm |
Main Structure and Ttechnical Features: Thermally Symmetric Box Structure: Effectively maintains the machine tool's condition against various environmental changes, ensuring thermal stability even during high-speed operation. The crossbeam employs a horizontal guide rail structure; when the X-axis slide seat moves on the crossbeam, it lowers the structural center of gravity, minimizing machine vibration and reducing structural deformation. |
 Thermally Symmetrical Box Structure |
| Absolute Grating Scale: The XYZ axes are standardly equipped with German Heidenhain absolute linear scales (resolution: 10nm). When the machine moves rapidly, thermal displacement occurs, and the displacement value is fed back to the controller for compensation. |  The XYZ Axes Come Standard with a Heidenhain Absolute Linear Eencoder from Germany with a Resolution of 10nm |
| Linear Motor Drive: The application of linear motors and their drive control technology on the feed axes of machine tools achieves "zero backlash." Through the electromagnetic effect, electrical energy is converted into linear motion, with no gaps and no wear, offering advantages such as high precision, high feed efficiency, and high processing speed. Compared with traditional screw drives, linear motors have a simpler structure, ensuring long-term high-precision machining while achieving zero out-of-range operation. |  Linear Motor Drive |
| Broken Tool Detection and Ultra-Precision Filtration System: Equipped with an automatic workpiece alignment function and an automatic tool length measurement function, it solves the problems of difficult alignment of circular workpieces and difficult tool setting for tiny drill bits. Our self-developed high-pressure, high-precision center through-coolant system has a pressure of 70 bar and a filtration accuracy of 0.1 μm. It is equipped with a constant-temperature cooling system and can operate under high pressure continuously throughout the day. |
Thermally Symmetrical Box Structure - - |
The XYZ Axes Come Standard with a Heidenhain Absolute Linear Eencoder from Germany with a Resolution of 10nm |
Linear Motor Drive - - |
| # | Item | TMS400 | TMS600-DOUBLE |
| 1 | XYZ Axis Travel | X-axis 500, Y-axis 500, Z-axis 200 | X-axis 600, Y-axis 600, Z-axis 250 |
| 2 | Standard Spindle Speed | Single Spindle 30,000 rpm | Single Spindle 30,000 rpm |
| 3 | Optional Spindle Speed | Single Spindle 40,000 rpm | Single Spindle 40,000 rpm |
| 4 | Positioning Accuracy | 3µm | 3µm |
| 5 | Repeatability | 2µm | 2µm |
| Using Professional Technology, We Can Achieve The "Made in China" of Micrometer-Level Equipments. |
| Cradle Type Five Axis Precision Machining Center | Direct Drive Precision Machining Equipment |
| Small Five-Axis Precision Machining Equipment | Ultra-High Precision Semiconductor Micropore Equipment |
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